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Model features
Name ：Regulator for Semiconductor Industry
Model No.：XR56 Series
Model No.：XR56 Series
Overview：
This is a pressure regulator for general use, developed for a gas supply system of various semiconductors and a manufacturing apparatus of semiconductor industry
Feature：
This regulator is designed in small size for miniaturization;
Assembly, adjustment, inspection and packaging are performed in a clean room to minimize the number of particles.
For monitoring the outlet pressure, pressure gauge can be installed.
Assembly, adjustment, inspection and packaging are performed in a clean room to minimize the number of particles.
For monitoring the outlet pressure, pressure gauge can be installed.